柯晴青
一、 个人简介
柯晴青，女，博士毕业于新加坡国立大学，中山大学微电子科学与技术学院、集成电路学院双聘教授，博士生导师，入选国家重大人才计划“青年项目”。长期从事压电陶瓷以及薄膜材料的研发与换能器制造、多模态光声/超声传感系统的设计与集成等。研究内容涉及声学、材料学、机械工程、电子工程与信号处理等学科。担任中国光学工程学会委员、国家科技部入库专家、科技部重点研发计划“仪器专项”项目评审专家，教育部学位论文评议专家等。近年来，申请人带领研究团队承担了多项省部级科研项目，包括国家重大人才计划“青年项目”、军委科技委重点项目、173计划技术领域基金、广东省联合基金重点项目、广东省国际合作项目等。通过不断加强基础研究，已经取得了一批有代表性的科研成果，在包括IEEE T. UFFC、IEEE Senor Journal、IEEE MEMS、IEEE TRANSDUCERS、Sensor and Actuators A: Physica等传感器权威期刊以及IEEE MEMS、IEEE TRANSDUCERS等顶级会议发表SCI论文60 余篇，总引用超过5800余次，申请专利8项。
二、 研究领域
（1）压电晶圆(AlN、ZnO等)生长与薄膜传感器
（2）微纳声学传感元件（PMUT、SAW等）与MEMS微系统
（3）阵列超声换能器与成像检测以及定位应用等
三、 教育背景
2001.09-2005.07 西北工业大学 材料与工程学院 本科
2005.08-2008.04 西北工业大学 材料与工程学院 硕士
2008.08-2012.12新加坡国立大学 材料与工程学院 博士
四、 工作经历
2012.08-2016.04 新加坡国立大学 材料与工程学院 博士后研究员
2016.04-2020.04新加坡科技研究局下属材料研究院 研究科学家
2020.04-至今 中山大学微电子科学与技术学院 教授
五、 部分代表性成果
图. 部分代表性成果
1. C. Cheng，Qingqing Ke* (通讯作者) et al, "Highly Sensitive Lithium Niobate-Based Saw Strain Sensor With on-Chip Temperature Compensation," 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), Kaohsiung, Taiwan, 2025, pp. 677-680, doi: 10.1109/MEMS61431.2025.10918044.
2. X. Li，Qingqing Ke* (通讯作者) et al., "In-Situ Saw/Baw Sensors Based on P(VDF-TRFE) for Strain and Temperature Measurement," 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), Kaohsiung, Taiwan, 2025, pp. 681-684, doi: 10.1109/MEMS61431.2025.10918126.
3. Chunlong Cheng, Yanxin Liu, Xiaoru Li, Jingwen Yang, Tong Tong, Qingqing Ke*, “The strain transfer characteristics of SAW strain sensors and their impact on the sensor performance”，Sensors and Actuators: A. Physical 389 (2025) 116575 .
4. Zhuoyue Zheng, Xinyu Wu, Yuan Wang, Huahuang Luo, Qingqing Ke* (共同通讯), Chen Wang, Michael Kraft, Rui P. Martins and Pui In Mak, “Toward a Tunable AlN-Based Piezoelectric MEMS Microphone: Design, Characterization, and Analysis”, Journal of Microelectromechanical Systems, 34(4), 432-442(2025).
5. Zekai Meng, Jingwen Yang, Chunlong Cheng, Xuefei Yan, Guoxiang Zhang, Qingqing Ke*（通讯作者），“High Sensitivity Strain Sensing over an Ultra Wide Range achieved on Temperature Compensated Multimodal Flexible SAW Device”，IEEE Sensors Journal, 25, 39450-39456（2025）.
6. Weiting Liu，Zhiqing Zhang，Kanjie Du，Mang I Vai and Qingqing Ke*，“Comparison of High-Frequency Circular Array Imaging Algo-rithms for Intravascular Ultrasound Imaging Simulations”， Electronics 2025, 14, 4623.
7. Liu, C. Cheng, H. Luo, T. Luo, L. Xiong and Q. Ke（唯一通讯）, "Decoupling of Temperature-Strain Signals in Surface Acoustic Wave Sensors Using Machine Learning Algorithms," in Journal of Microelectromechanical Systems, 35(1), 29-39(2026), doi: 10.1109/JMEMS.2025.3611965.
8. Zhiqing Zhang , Zhiguo Wang, Shuai Yang, Fei Li*, Qingqing Ke* (共同通讯)，“Textured ferroelectric ceramics based 1–3 piezoelectric composite for photoacoustic imaging”，Sensors & Actuators: A. Physical，380，116030(2024).
9. Zhiqing Zhang, Xiaoxiang An, Shifeng Guo, Xiaoyue Gong, Qingqing Ke* (通讯作者)，“Design and fabrication of annular-Array ultrasound transducer based (K, Na) NbO3 lead-Free 1–3 piezoelectric composite”，IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 71. 45(2024).
10. Chunlong Cheng, Zihan Lu, Jingwen Yang, Xiaoyue Gong*, Qingqing Ke* (共同通讯), “Modulating the performance of the SAW strain sensor based on dual-port resonator using FM Simulation”, Materials, 16, 3269(2022).
11. Qingqing Ke, Weng Heng Liew, Member, IEEE, Lei Zhang, Tan Chin Yaw, Changyun Jiang, Chee Kiang Ivan Tan, Kui Yao “Concave array ultrasonic transducer from multilayer piezoelectric ceramic for photoacoustic imaging”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control，68，2760(2021).
12. Weng Heng Liew, Qingqing Ke, Chin Yaw Tan, Shuting Chen, Kui Yao, “Ultrasonic transducer from piezoelectric polymer multilayer through electrophoretic deposition for photoacoustic imaging”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 8, 2741(2021).
13. Ting Zheng, Yang Zhang, Qingqing Ke# (共同一作), “High-performance potassium sodium niobate piezoceramics for ultrasonic transducer”, Nano Energy, 70, 104559 (2020).
14. Qingqing Ke, Weng Heng Liew, Hong Tao, Jiagang Wu and Kui Yao “KNNS-BNZH lead-Free 1–3 piezoelectric composite for ultrasonic and photoacoustic Imaging”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 66, 1395 (2019).
15. Qingqing Ke, Weng Heng Liew, Lei Zhang, Chee Kiang Ivan Tan, Changyun Jiang, and Kui Yao “Broadband ultrasonic array transducer from multilayer piezoelectric ceramic with lowered co-firing temperature”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 66, 1395 (2019).